SM-580 in-line Centrifugal cleaning machine

SM-580 in-line Centrifugal cleaning machine

The equipment adopts high-speed centrifugal design, which is mainly used for precise cleaning of silicon, dust and iron scraps on the surface of lens holder assembly (CMOS body, CCD), and equipped with two-fluid cleaning, electrostatic elimination, high-speed centrifugation and other devices to achieve the purpose of drying and cleaning.

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◆Replaceable wafer placement fixture；

◆The integrated cleaning system is adopted for the equipment, which can realize single-sided cleaning and double-sided cleaning；

◆The operation procedure can be compiled and adjusted according to the operation requirements, which is convenient, quick and more humanized；

◆Rotary spray rod, change position when cleaning and centrifugal dehydration, avoid secondary contamination of products;

◆High speed centrifugal design, the revolving speed can be adjusted in the range of 10-1500r / min;

◆Equipped with unique electrostatic elimination device, assisted cleaning to achieve the best results；

◆Equipped with two-stage air filtration system, complying with ISO8573.1 standard; the compressed air connected to the equipment is cleaner；

◆Space saving design: reduce equipment width；

◆The whole machine is made of 316 stainless steel body, which is resistant to acid and alkali and has no pollution to the working environment. The mirror shell makes the equipment easy to clean during maintenance；

◆Equipped with optical fiber induction detection system to avoid overlapping of incoming materials;

Dimension	Without feeding machine: 1310Lx1220Wx1950H (mm) With feeding machine: 1770Lx1220Wx1950H (mm)
Power Supply	7KW 13A 380V 50Hz (Three phase five wire)
Power consumption	Cleaning: 7KW / h; Standby: 1kW / h
Transmission power	3KW
Pure water cleanliness	≧17MΩ.cm
Pure water pressure	≧0.2MPa
Compressed air capacity	≧8m³/min
Compressed air pressure	0.3--0.6MPa
Equipment material	Machine body 316 mirror stainless steel
Control mode	PLC+ touch screen + own research and development software
Centrifugal cleaning releases pressure	0.15--1.4MPa
Cleaning method	Water and air two-fluid cleaning
Drying method	High speed centrifugal dehydration (ionic wind assisted)
Pure water filtration accuracy	1μm
Air filtration accuracy	0.01μm
Diameter of cleanable dust	≧1μm ≧99.5%
Maximum consumption of pure water	10L/min
Gas consumption	100-300L/Min
Maximum working panel	Φ530mm
Maximum cleaning workpiece	200（L）*140（W）mm
Working disk revolving speed	10--1500r/min
Fixture specification	Customization
Pure water inlet apertures	PT1″Pipe thread
Drainage outlet apertures	PT1″Pipe thread
Air inlet apertures	Φ12mmPU air pipe
Exhaust port apertures	4″×2（Need to strengthen ventilation, wind speed is greater than 3m/sec）
Pure water consumption	0-8L/Min
Environment filtering method	0.3μm
Air filtration mode	0.01μm×2（Precise）
Net weight	About 600KG

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SM-580 in-line Centrifugal cleaning machine

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